Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395194 | Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using same | Peter C. Van Buskirk, Jonathan Wolk, George E. Emond | 2002-05-28 |
| 6346741 | Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same | Peter C. Van Buskirk, Steven M. Bilodeau, Thomas H. Baum | 2002-02-12 |