Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685960 | Method for forming aluminum contacts | Jianming Fu | 1997-11-11 |
| 5668055 | Method of filling of contact openings and vias by self-extrusion of overlying compressively stressed matal layer | Tse-Yong Yao, Hoa Kieu, Julio Aranovich | 1997-09-16 |
| 5610103 | Ultrasonic wave assisted contact hole filling | Fusen Chen | 1997-03-11 |