Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685327 | Ultra-low particle semiconductor apparatus | Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, John H. Anderson, Sr., Jeffrey Nowell | 1997-11-11 |
| 5651379 | Method and apparatus for delivering ultra-low particle counts in semiconductor manufacturing | Raj Mohindra, Abhay Bhushan, Rajiv Bhushan | 1997-07-29 |
| 5634978 | Ultra-low particle semiconductor method | Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, John H. Anderson, Sr., Jeffrey Nowell | 1997-06-03 |