TY

Tomohiro Yuuki

Yamaha: 2 patents #24 of 184Top 15%
Overall (1997): #21,049 of 185,788Top 15%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5633212 Pyrogenic wet thermal oxidation of semiconductor wafers 1997-05-27
5618349 Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity 1997-04-08