ST

Suguru Tabara

Yamaha: 3 patents #7 of 184Top 4%
Overall (1997): #10,768 of 185,788Top 6%
3
Patents 1997

Issued Patents 1997

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5686363 Controlled taper etching — 1997-11-11
5670422 Method of forming an interconnection with metal plug and reduced step — 1997-09-23
5639341 Dry etching with less particles — 1997-06-17