Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5664251 | Method of making an aperture plate for a multibeam pattern drawing apparatus | Satoru Tachihara, Koichi Maruyama, Tetsuya Nakamura, Tamihiro Miyoshi, Shinichi Suzuki | 1997-09-02 |