Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658710 | Method of making superhard mechanical microstructures | — | 1997-08-19 |
| 5648618 | Micromachined hinge having an integral torsion sensor | Timothy G. Slater | 1997-07-15 |
| 5629790 | Micromachined torsional scanner | Timothy G. Slater | 1997-05-13 |