Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5624582 | Optimization of dry etching through the control of helium backside pressure | — | 1997-04-29 |
| 5610105 | Densification in an intermetal dielectric film | Landon B. Vines, Sigmund Koenigseder, Chang-Ou Lee, Felix Fujishiro | 1997-03-11 |