Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629528 | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Leo V. Klos, Michael E. Mack | 1997-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629528 | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Leo V. Klos, Michael E. Mack | 1997-05-13 |