Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605866 | Clamp with wafer release for semiconductor wafer processing equipment | Adolphus E. McClanahan, Kenneth E. Anderson, Phillip B. Nicholson, Martin A. Hutchinson | 1997-02-25 |