Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702573 | Method and apparatus for improved low pressure collimated magnetron sputter deposition of metal films | Maximilian A. Biberger | 1997-12-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702573 | Method and apparatus for improved low pressure collimated magnetron sputter deposition of metal films | Maximilian A. Biberger | 1997-12-30 |