Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656781 | Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers | — | 1997-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656781 | Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers | — | 1997-08-12 |