Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677113 | Method for ashing a photoresist resin film on a semiconductor wafer and an asher | Shinji Suzuki, Kyohei Seki, Tetsuji Arai | 1997-10-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677113 | Method for ashing a photoresist resin film on a semiconductor wafer and an asher | Shinji Suzuki, Kyohei Seki, Tetsuji Arai | 1997-10-14 |