Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5618395 | Method of plasma-activated reactive deposition of electrically conducting multicomponent material from a gas phase | — | 1997-04-08 |
| 5592043 | Cathode including a solid body | Hans Lydtin | 1997-01-07 |