Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650043 | Etching method using NH.sub.4 F solution to make surface of silicon smooth in atomic order | Kazutoshi Kaji, Kingo Itaya, Toshihiko Sakuhara | 1997-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650043 | Etching method using NH.sub.4 F solution to make surface of silicon smooth in atomic order | Kazutoshi Kaji, Kingo Itaya, Toshihiko Sakuhara | 1997-07-22 |