Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683072 | Thin film forming equipment | Tadahiro Ohmi, Tadashi Shibata | 1997-11-04 |
| 5591267 | Reduced pressure device | Tadahiro Ohmi | 1997-01-07 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683072 | Thin film forming equipment | Tadahiro Ohmi, Tadashi Shibata | 1997-11-04 |
| 5591267 | Reduced pressure device | Tadahiro Ohmi | 1997-01-07 |