Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5633194 | Low temperature ion-beam assisted deposition methods for realizing SiGe/Si heterostructure | C. R. Selvakumar, S. Mohajerzadeh | 1997-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5633194 | Low temperature ion-beam assisted deposition methods for realizing SiGe/Si heterostructure | C. R. Selvakumar, S. Mohajerzadeh | 1997-05-27 |