Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653807 | Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy | — | 1997-08-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653807 | Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy | — | 1997-08-05 |