Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698082 | Method and apparatus for coating substrates in a vacuum chamber, with a system for the detection and suppression of undesirable arcing | Gotz Teschner | 1997-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698082 | Method and apparatus for coating substrates in a vacuum chamber, with a system for the detection and suppression of undesirable arcing | Gotz Teschner | 1997-12-16 |