Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629127 | Positive electron beam resist composition containing cresolnovolak resin, select additive and methyl gallate/1,2-naphthoquinonediazido-4-sulfonyl chloride reaction product | Hiroki Oosedo, Mutsuo Kataoka, Mayumi Kataoka, legal representative, Shigeyoshi Kanetsuki, Kazutaka Tamura | 1997-05-13 |
| 5614354 | Method of forming positive polyimide patterns | Masuichi Eguchi, Kazutaka Kusano | 1997-03-25 |