Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626714 | Method for detecting etching endpoint and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Tadao Nakatsuka, Hiroyuki Tanaka, Toshiyuki Nakamura | 1997-05-06 |