Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5690743 | Liquid material supply apparatus and method | Tatsuo Hatano | 1997-11-25 |
| 5595606 | Shower head and film forming apparatus using the same | Yuichiro Fujikawa, Tatsuo Hatano | 1997-01-21 |