KT

Kazuo Terada

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Tohoku Limited: 1 patents #5 of 36Top 15%
Overall (1997): #121,547 of 185,788Top 70%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5616264 Method and apparatus for controlling temperature in rapid heat treatment system Katsuo Nishi, Wataru Ohkase, Kenichi Yamaga 1997-04-01