Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5622639 | Heat treating apparatus | Hirofumi Kitayama, Toshimitu Shibata, Toshiaki Miyaju | 1997-04-22 |
| 5611863 | Semiconductor processing apparatus and cleaning method thereof | — | 1997-03-18 |