Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677783 | Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate | David M. Bloom, Francisco S. A. Sandejas, Raj B. Apte | 1997-10-14 |