Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5631198 | Method for making a piezoresistive pressure sensor of semiconductor material employing anisotropic etching | — | 1997-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5631198 | Method for making a piezoresistive pressure sensor of semiconductor material employing anisotropic etching | — | 1997-05-20 |