Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698038 | Method for wafer carrier cleaning | Robert F. Kunesh | 1997-12-16 |
| 5698040 | Method for rotational wafer cleaning in solution | Robert F. Kunesh | 1997-12-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698038 | Method for wafer carrier cleaning | Robert F. Kunesh | 1997-12-16 |
| 5698040 | Method for rotational wafer cleaning in solution | Robert F. Kunesh | 1997-12-16 |