Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700628 | Dry microlithography process | — | 1997-12-23 |
| 5641707 | Direct gas-phase doping of semiconductor wafers using an organic dopant source of phosphorus | — | 1997-06-24 |
| 5635409 | Real-time multi-zone semiconductor wafer temperature and process uniformity control system | — | 1997-06-03 |
| 5599735 | Method for doped shallow junction formation using direct gas-phase doping | — | 1997-02-04 |