Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686356 | Conductor reticulation for improved device planarity | Michael F. Chisholm | 1997-11-11 |
| 5621241 | Enhancement in throughput and planarity during CMP using a dielectric stack containing HDP-SiO.sub.2 films | — | 1997-04-15 |
| 5602423 | Damascene conductors with embedded pillars | — | 1997-02-11 |