Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650881 | Support post architecture for micromechanical devices | — | 1997-07-22 |
| 5602671 | Low surface energy passivation layer for micromechanical devices | — | 1997-02-11 |
| 5600383 | Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer | — | 1997-02-04 |