Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693574 | Process for the laminar joining of silicon semiconductor slices | Klaus Panitsch | 1997-12-02 |
| 5623099 | Two-element semiconductor capacitive acceleration sensor | Udo Nothelfer | 1997-04-22 |