Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685169 | Method and apparatus for preparing high purity hydrogen bromide | Shinji Tomita | 1997-11-11 |
| 5682761 | Ultra-high purity nitrogen generating method and unit | Takao Yamamoto, Shinji Tomita | 1997-11-04 |
| 5617740 | Method of producing ultra high purity monosilane and apparatus therefor | Shinji Tomita | 1997-04-08 |