Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693976 | MOSFET device having denuded zones for forming alignment marks | — | 1997-12-02 |
| 5685947 | Chemical-mechanical polishing with an embedded abrasive | Huan Chi Tseng | 1997-11-11 |
| 5674357 | Semiconductor substrate cleaning process | YI SUN | 1997-10-07 |
| 5668401 | Chessboard pattern layout for scribe lines | Chih-Heng Shen | 1997-09-16 |
| 5591673 | Tungsten stud process for stacked via applications | Chih-Heng Shen, Yi-Dong Yan | 1997-01-07 |