Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700726 | Multi-layered tungsten depositions for contact hole filling | Yung-Sheng Huang | 1997-12-23 |
| 5677237 | Process for removing seams in tungsten plugs | Yung-Sheng Huang | 1997-10-14 |