Issued Patents 1997
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702967 | Method of fabricating a deep submicron MOSFET device using a recessed, narrow polysilicon gate structure | — | 1997-12-30 |
| 5696395 | Dynamic random access memory with fin-type stacked capacitor | — | 1997-12-09 |
| 5693562 | Method for forming a barrier metal film with conformal step coverage in a semiconductor integrated circuit | — | 1997-12-02 |
| 5688706 | Method for fabricating a MOSFET device, with local channel doping, self aligned to a selectively deposited tungsten gate | — | 1997-11-18 |
| 5681774 | Method of fabricating a toothed-shape capacitor node using a thin oxide as a mask | — | 1997-10-28 |
| 5681773 | Method for forming a DRAM capacitor | — | 1997-10-28 |
| 5677222 | Method for forming a DRAM capacitor | — | 1997-10-14 |
| 5677221 | Method of manufacture DRAM capacitor with reduced layout area | — | 1997-10-14 |
| 5677216 | Method of manufacturing a floating gate with high gate coupling ratio | — | 1997-10-14 |
| 5677217 | Method for fabricating a mosfet device, with local channel doping and a titanium silicide gate | — | 1997-10-14 |
| 5677218 | Method of fabricating FET device with narrow gate length | — | 1997-10-14 |
| 5677228 | Method of fabricating a resistor in an integrated circuit | — | 1997-10-14 |
| 5677223 | Method for manufacturing a DRAM with reduced cell area | — | 1997-10-14 |
| 5670407 | Method of fabricating a toothed-shape capacitor node in a semiconductor DRAM circuit | — | 1997-09-23 |
| 5670401 | Method for fabricating a deep submicron mosfet device using an in-situ polymer spacer to decrease device channel length | — | 1997-09-23 |
| 5670405 | Method of making a tooth shaped capacitor using ion implantation | — | 1997-09-23 |
| 5670406 | Method of making a tooth shaped capacitor | — | 1997-09-23 |
| 5663093 | Method for forming a cylindrical capacitor having a central spine | Chih-Yuan Lu | 1997-09-02 |
| 5656532 | Method for fabricating a coaxial capacitor of a semiconductor device | — | 1997-08-12 |
| 5652165 | Method of forming a stacked capacitor with a double wall crown shape | Chih-Yuan Lu | 1997-07-29 |
| 5643819 | Method of fabricating fork-shaped stacked capacitors for DRAM cells | — | 1997-07-01 |
| 5631480 | DRAM stack capacitor with ladder storage node | Chih-Yuan Lu | 1997-05-20 |
| 5604146 | Method to fabricate a semiconductor memory device having an E-shaped storage node | — | 1997-02-18 |
| 5599736 | Fabrication method for polysilicon contact plugs | — | 1997-02-04 |
| 5595926 | Method for fabricating a DRAM trench capacitor with recessed pillar | — | 1997-01-21 |