Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5608816 | Apparatus for inspecting a wiring pattern according to a micro-inspection and a macro-inspection performed in parallel | Toyoki Kawahara, Atsuharu Yamamoto, Hidehiko Kawakami, Hideaki Kawamura | 1997-03-04 |