Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689193 | Probe head, method for manufacturing the same, and inspecting method using the same | — | 1997-11-18 |
| 5619145 | Probe apparatus and method for inspecting object using the probe apparatus | — | 1997-04-08 |
| 5594713 | Optical pickup head apparatus | Yoshiaki Komma, Seiji Nishino, Makoto Kato | 1997-01-14 |