Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641358 | Modular parylene deposition apparatus having vapor deposition chamber extension | — | 1997-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641358 | Modular parylene deposition apparatus having vapor deposition chamber extension | — | 1997-06-24 |