Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628564 | Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems | Zsolt Nenyei, Andreas Tillmann | 1997-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628564 | Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems | Zsolt Nenyei, Andreas Tillmann | 1997-05-13 |