Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698346 | Photomask-pattern-shape evaluation method, photomask, photomask manufacturing method, photomask-pattern forming method, and exposure method | — | 1997-12-16 |
| 5682056 | Phase shifting mask and method of manufacturing same | — | 1997-10-28 |
| 5650854 | Method of checking defects in patterns formed on photo masks | — | 1997-07-22 |