Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637180 | Plasma processing method and plasma generator | Jonathan Westwater, Setsuo Usui | 1997-06-10 |
| 5627085 | Method for hydrogenating a polycrystal silicon layer of a thin film transistor | Jonathan Westwater, Setsuo Usui | 1997-05-06 |
| 5591653 | Method of manufacturing Si-Ge thin film transistor | Toshiyuki Sameshima, Masaki Hara, Naoki Sano, Setsuo Usui | 1997-01-07 |