Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597438 | Etch chamber having three independently controlled electrodes | Volker B. Laux | 1997-01-28 |
| 5591301 | Plasma etching method | — | 1997-01-07 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597438 | Etch chamber having three independently controlled electrodes | Volker B. Laux | 1997-01-28 |
| 5591301 | Plasma etching method | — | 1997-01-07 |