Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5644140 | Apparatus for checking semiconductor wafers with complementary light sources and two cameras | Ernst Biedermann, Manfred Ben El Mekki, Thomas Griebsch, Gerhard Ross | 1997-07-01 |