Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5612539 | Method of evaluating lifetime related quality of semiconductor surface | Yutaka Kitagawara, Takao Takenaka | 1997-03-18 |
| 5598452 | Method of evaluating a silicon single crystal | Hiroshi Takeno, Satoshi Ushio, Takao Takenaka | 1997-01-28 |