Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620357 | Polishing method and apparatus for automatic reduction of wafer taper in single-wafer polishing | Hitoshi Misaka, Kouichi Tanaka, Kouji Morita | 1997-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620357 | Polishing method and apparatus for automatic reduction of wafer taper in single-wafer polishing | Hitoshi Misaka, Kouichi Tanaka, Kouji Morita | 1997-04-15 |