Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5696034 | Method for producing semiconductor substrate | Isao Moroga, Isao Shirai, Youichi Kumaki, Akio Kasahara | 1997-12-09 |
| 5650353 | Method for production of SOI substrate | Katsuo Yoshizawa, Tsutomu Sato, Kiyoshi Mitani | 1997-07-22 |