Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688410 | Method of ashing resist and apparatus therefor | Masaru Kajitani, Katsuhiro Kawai, Masaya Okamoto | 1997-11-18 |
SY
Satoshi Yabuta
Overall (1997): #80,554 of 185,788Top 45%
1
Patents 1997