Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685913 | Plasma processing apparatus and method | Takashi Inujima, Toru Takayama | 1997-11-11 |
| 5629245 | Method for forming a multi-layer planarization structure | Takashi Inushima, Shigenori Hayashi, Toru Takayama, Masakazu Odaka | 1997-05-13 |