Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672906 | Semiconductor device having defects of deep level generated by electron beam irradiation in a semiconductor substrate | Yutaka Saito, Takao Akiba, Masaaki Kamiya, Hitomi Watanabe | 1997-09-30 |