Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685906 | Method and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer quality | Gerald R. Dietze | 1997-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685906 | Method and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer quality | Gerald R. Dietze | 1997-11-11 |